GD-Profiler 2TM

Pulsed RF Glow Discharge Optical Emission Spectrometer for ultra-fast, high-resolution depth profiling.

• Status: Active
• Country: Japan
• Type of measurable elements: Metals and non-metals
• Measurable isotopes/elements: All elements including light elements (H, C, O, N, etc.) and trace heavy metals
• Sensitivity : Sub-ppm to 100% concentration; high dynamic range
• Possible Matrixes : Conductive and non-conductive materials, thin films, coatings, polymers, metals
• Optic System : Polychromator + Monochromator, High Dynamic Detectors (HDD), full spectrum, ultra-fast
• Optical chamber : Large vacuum chamber with dual-pump pressure control
• Detection system/detector : High Dynamic Detection (HDD), CCD-based
• Grating /Wavelength range : 120–800 nm, optimized gratings for VUV/UV/IR detection
• Spark Stand : Glow discharge source with plasma confined in an anode tube
• Source frequency : Pulsed RF with real-time tuning; up to several hundred Hz
• Discharge parameters : 13.56 MHz RF plasma, capacitive coupling, programmable pulsing
• Correction : auto-calibration
• Vacuum system : Double vacuum pumping system
• Gas supply: Argon gas with <0.3 L/min consumption