Metrios 6

Fully automated TEM metrology platform for semiconductor fabs; Operator-free lamella handling; Integrated with Vulcan Automated Lab

• Status: Active
• Country: USA
• Electron gun type : Cold FEG
• Electron gun type : Extreme FEG
• Standard detectors : HAADF; 8-segmented BF/ADF; Ceta 16M
• Optional detectors : Gatan Continuum; EMPAD
• Cryo : Optional
• STEM : Yes
• STEM parameters: HAADF, segmented BF/ADF; iDPC
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS (Ultra-X); iDPC; automated EDS tomography; metrology automation
• Electron optics : Three-lens condenser system; symmetric Super-TWIN lens; constant power lenses
• Resolution : STEM: ≤60 pm (X-CFEG); ≤83 pm (X-FEG)
• Optical column : S-CORR probe corrector; CEOS Auto S-CORR; objective aperture in BFP
• Electron beam resolution : Sub-Å resolution; ≤0.4 eV energy spread (X-CFEG)
• Beam current : - numerically
• Accelerating voltage : 60–200 kV
• Image parameters : iDPC, OptiSTEM+, Velox STEM interface
• Chamber : Environmental enclosure standard
• Camera details : Ceta 16M CMOS; Gatan Continuum optional
• Stage parameters : Piezo stage, 5-axis; tilt ±40° (beta); ≤20 pm XYZ step
• Holder Types : High-accuracy beta-tilt holder; EFEM-compatible TEM lamella carriers
• Sample size: Lamella carriers with automated tray handling (LCC)
• Aberration Correction type : S-CORR (A5-capable); CEOS Auto S-CORR
• Cooling system : Cold trap (4-day operation)
• Vibration, Magnetic, Noise tolerance : Enclosure; automated calibration enhances performance