Metrios AX

60–200 kV S/TEM for high-throughput semiconductor metrology; Machine-learning-based automation; Sub-Å imaging with A5 correction

• Status: Active
• Country: USA
• Electron gun type : Cold FEG
• Electron gun type : Extreme FEG
• Standard detectors : HAADF; 8-segmented BF/ADF; Ceta 16M
• Optional detectors : Gatan Energy Filter; Gatan OneView; EMPAD
• STEM : Yes
• STEM parameters: HAADF, segmented BF/ADF; iDPC; DPC
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS (Dual-X); EELS; EFTEM; iDPC; automated metrology
• Electron optics : Three-lens condenser system; symmetric X-TWIN lens; constant power lenses; mechanical column stacking
• Resolution : STEM: ≤60 pm (X-CFEG); ≤83 pm (X-FEG)
• Optical column : S-CORR probe corrector; CEOS Auto S-CORR (up to 4th order); sub-Å at 60–200 kV
• Electron beam resolution : Sub-Å resolution for all voltages (manual); ≤0.4 eV energy spread (X-CFEG)
• Beam current : - numerically
• Accelerating voltage : 60–200 kV (300 kV also mentioned)
• Image parameters : iDPC, OptiSTEM+, automated low-dose STEM
• Chamber : Environmental enclosure standard
• Camera details : Ceta 16M CMOS; OneView optional
• Stage parameters : Piezo stage, 5-axis; tilt ±40° analytical, ±75° tomography; ≤20 pm XYZ step
• Holder Types : Single-tilt, double-tilt, tomography, in situ
• Sample size: TEM lamella carrier (LC) based loading
• Aberration Correction type : S-CORR (A5-capable); CEOS Auto S-CORR
• Cooling system : Cold trap (4-day operation)
• Vibration, Magnetic, Noise tolerance : Enclosure lowers acoustic and thermal effects