MiniSIMS-TOF

Compact TOF-SIMS for full-spectral imaging and profiling.

• Status: Active
• Country: UK
• Isotopic: Yes
• Elemental: Yes
• Type of measurable elements: Most of elements, isotopes, and molecular species
• Measurable isotopes/elements: All detectable
• Analyzer type : Time-of-Flight MS
• Ion source type: Ga⁺ beam (5 keV)
• Inlet types: Direct surface
• Mass range : 1–1200 m/z
• Mass resolution/ Mass resolving power : >650 m/Δm 27 m/z
• Sensitivity : >10⁴ cps/nA
• Detection limits : ppm level
• Precision : <100 ppm (with calibration)
• Primary beam : Ga⁺
• Voltage : 5 keV
• Spatial resolution : <10 µm
• Depth profile : Yes
• Beam energy : 5 keV
• Focusing type : Electrostatic
• Vacuum system : <1×10⁻⁶ mbar; pump down <5 min (dry N₂)
• Gas supply: Dry N₂
• Power Requirements and Consumption : <1.2 kVA, single phase
• Dimensions and Weight: <0.8 m², ~100 kg