NANOS

Tabletop SEM with integrated EDS. Offers high-resolution imaging, low-vacuum mode, and an intuitive Discover user interface. Designed for educational, research, and industrial use.

• Status: Active
• Country: Netherlands
• Electron gun type : W Thermionic source
• Standard detectors : Secondary Electron Detector (SED), Backscattered Electron Detector (BSD – 4 quadrant), Energy Dispersive Spectroscopy (EDS – embedded)
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS – Point, Line Scan, and Mapping
• Electron optics : Optimized thermionic source (tungsten) with electromagnetic coil lenses and electrostatic deflectors
• Resolution : < 8 nm
• Optical column : Electrostatic/electromagnetic configuration
• Electron beam resolution : < 8 nm
• Accelerating voltage : 1, 2, 5, 7, 10, 15, 20 kV
• Image parameters : JPEG, TIFF, PNG, BMP formats; capture resolution up to 4096 × 4096 px (4K); mixed SE & BSE mode; EDS Point, Line, Mapping
• Magnification : 100× – 200,000×
• Camera details : Full color optical navigation camera (2x and 12x optical, up to 60x digital zoom)
• Stage parameters : Computer-controlled motorized X, Y: 25 × 25 mm; manual eucentric tilt: +15° to –40°
• Sample size: Up to 45 mm diameter (max tilt: +15° to –15°); up to 14 mm height (optional: 22 and 40 mm)
• Cooling system : Thermoelectrically cooled EDS detector
• Vacuum system : Pfeiffer turbomolecular pump and oil-free membrane pre-vacuum pump; high vacuum and low vacuum (40 Pa) modes
• Power Requirements and Consumption : 110 W typical (max 140 W)
• Environmental requirements : 15–25 °C; humidity 20–80% RH
• Dimensions and Weight: 280 (W) × 470 (D) × 550 (H) mm; 62 kg