NEOARM / JEM-ARM200F

Atomic resolution analytical electron microscope. Cold FEG with ASCOR corrector for low aberration. Enhanced ABF for light atoms.

• Status: Active
• Country: Japan
• Electron gun type : Cold FEG
• Standard detectors : e-ABF detector, integrated viewing camera system
• STEM : Yes
• STEM parameters: Perfect sight NEO detector, hybrid scintillator enhanced signal 2.0× at 60 kV, 1.5× at 200 kV
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Enhanced ABF, real-time signal processing
• Electron optics : STEM: NEO ASCOR HOAC, TEM: CETCOR with DSS
• Resolution : STEM HAADF image: 70 pm (200 kV), 100 pm (80 kV), 160 pm (30 kV); TEM info limit: 100 pm (200 kV), 110 pm (80 kV), 250 pm (30 kV)
• Electron beam resolution : STEM HAADF image: 70–160 pm; TEM info limit: 100–250 pm
• Accelerating voltage : 30 to 200 kV (80, 200 kV standard, 30, 60, 120 kV option)
• Image parameters : ABF, e-ABF, STEM HAADF, BF, Lorentz mode
• Camera details : Integrated viewing camera system
• Stage parameters : X, Y, Z super fine mechanical drives, ultra fine piezo device drives
• Aberration Correction type : NEO ASCOR HOAC (STEM), CETCOR with DSS (TEM), JEOL COSMOTM auto tuning
• Cooling system : Flow rate 13.5 L/min (with double Cs corrector), temperature 15–20 °C
• Power Requirements and Consumption : Single phase 200 V, 50 or 60 Hz, 7 kVA
• Environmental requirements : Room temp 15–25 °C, drift ≤0.2 °C/h, fluctuation ≤0.05 °C/min, humidity ≤60%
• Dimensions and Weight: Microscope room: 5,000×5,500×3,500 mm, Utility room: 5,000×2,200×2,000 mm, Entrance: 1,200×2,000 mm