Nion HERMES

STEM optimized for ultra-high-resolution EELS analysis. Achieves <5 meV energy resolution at 30 kV. Uses dispersing-undispersing monochromator and CFEG.

• Status: Active
• Country: USA
• Country: Germany
• Electron gun type : CeB₆ Thermionic source
• STEM : Yes
• STEM parameters: >50 mr acceptance semi-angles
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Electron Energy Loss Spectroscopy (EELS)
• Electron optics : 5th-order-corrected EELS optics
• Resolution : <5 meV energy resolution at 30 kV (<6 meV at 60 kV)
• Optical column : Entirely ion-pumped; double μ-metal shielding
• Electron beam resolution : <5 meV at 30 kV
• Accelerating voltage : 30 kV to 200 kV
• Chamber : Ultra-high vacuum (sample vacuum <1x10⁻⁹ torr)
• Stage parameters : Friction-free, centro-symmetric sample stage
• Holder Types : Double tilt sample holder using ball bearings
• Aberration Correction type : Correction of all fifth-order axial aberrations
• Vacuum system : Ion-pumped; all metal seals; vacuum <1x10⁻⁹ torr
• Environmental requirements : Column bakeable to 140°C; stray AC shielding
• Vibration, Magnetic, Noise tolerance : Double μ-metal shielding of entire column