Phenom XL G2

Versatile desktop SEM that automates quality control

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : Backscattered electron detector
• Optional detectors : Secondary electron detector; Energy dispersive spectroscopy detector
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Energy dispersive spectroscopy; Element identification (EID); Elemental Mapping and Line Scan
• Electron optics : SEM column
• Resolution : <10 nm
• Electron beam resolution : <10 nm
• Beam current : Multiple beam currents
• Accelerating voltage : Default: 5 kV, 10 kV and 15 kV; Advanced mode: adjustable range between 4.8 kV and 20.5 kV
• Image parameters : JPEG, TIFF, PNG; 960 x 600, 1920 x 1200, 3840 x 2400 and 7680 x 4800 pixels
• Magnification : Electron magnification range: 160–200,000x
• Camera details : Proprietary high-resolution color navigation camera, single-shot
• Stage parameters : Computer-controlled motorized X and Y
• Holder Types : Eucentric sample holder
• Sample size: Max. 100 mm x 100 mm (up to 36 x 12 mm pin stubs); Max. 40 mm height (optional up to 65 mm)
• Vacuum system : Vacuum levels: Low - medium - high
• Power Requirements and Consumption : Single phase AC 100–240 Volt, 50/60 Hz, 163 W average, 348 W max
• Environmental requirements : Temperature 15°C ~ 30°C (59°F ~ 86°F); Humidity 20–80% RH
• Dimensions and Weight: Imaging module: 316(w) x 587(d) x 625(h) mm, 75 kg