SIMS workstation

A modular SIMS instrument optimized for surface and depth profiling applications. Features include dynamic SIMS, static SIMS, and SNMS modes with advanced ion guns and electron charge compensation.

• Status: Active
• Country: UK
• Isotopic: Yes
• Elemental: Yes
• Type of measurable elements: Most of elements, isotopes, and molecular species
• Measurable isotopes/elements: Isotopes and molecular species across the periodic table
• Analyzer type : Quadrupole MS (single)
• Ion source type: IG20 Gas Ion Gun, IG5C Cesium Ion Gun, electron charge compensation
• Inlet types: Loadlock sample introduction with customizable sample mounting
• Mass range : 300 amu, 500 amu or 1000 amu
• High Resolution : Yes
• Sensitivity : 107 cps
• Detection limits : Sub-ppm for specific elements and isotopes
• Precision : High precision for depth profiling and surface analysis
• Detector type : MAXIM SIMS/SNMS detector with off-axis collection
• Primary beam : Cesium (Cs+), Oxygen (O2+), and inert gases (e.g., Ar, Xe)
• Voltage : 1–5 keV for primary ions
• Spatial resolution : Down to 20 μmin imaging mode
• Depth profile : High depth resolution with precise sputtering
• Beam energy : Up to 5 keV for primary beams
• Camera : Normal incidence optical camera for sample observation
• Geometry type : Off-axis geometry with high collection efficiency
• Focusing type : Electrostatic focusing
• Cooling system : optional cryogenic traps
• Vacuum system : Ultra-high vacuum with turbo-molecular pumps
• Gas supply: Oxygen, cesium, inert gases (e.g., Ar, Xe)
• Power Requirements and Consumption : Single-phase, 2500 W