Spectra 200

High-throughput atomic-scale STEM; Optimized for 30–200 kV; Built-in S-CORR and X-CFEG

• Status: Active
• Country: USA
• Electron gun type : Cold FEG
• Standard detectors : Super-X/Dual-X EDX; Panther
• Optional detectors : EMPAD; Ceta 16M; Gatan OneView; Energy Filters
• STEM : Yes
• STEM parameters: iDPC, Panther, 5-channel STEM
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : STEM-EDX, EELS, iDPC, DPC, tomography
• Electron optics : X-CFEG; S-CORR; S-TWIN or X-TWIN lens
• Resolution : STEM: 60 pm at 200 kV; 136 pm at 30 kV
• Optical column : 3-lens condenser; ConstantPower Lens; low hysteresis
• Electron beam resolution : 0.4 eV (X-CFEG)
• Beam current : <1 pA supported; up to 480 pA in example
• Accelerating voltage : 30–200 kV
• Image parameters : 60 pm STEM; 0.36 eV energy resolution; iDPC
• Chamber : Wide-gap 5.4 mm S-TWIN pole piece (X-TWIN optional)
• Camera details : Ceta 16M; SmartCam suite
• Stage parameters : Piezo 5-axis; ±40°/±70°; 20 pm step
• Holder Types : Single/double tilt, tomography, in situ
• Aberration Correction type : S-CORR (Auto), OptiSTEM+ optional
• Cooling system : Cold trap (4-day operation)
• Environmental requirements : Passive/active vibration isolation (optional iVIS)
• Vibration, Magnetic, Noise tolerance : Passive/active isolation (optional)