TM4000PlusIII/TM4000III

Next-generation tabletop SEM with filament monitoring and automation. Low-vacuum imaging without preprocessing. High-current mode for EDS and fast particle analysis

• Status: Active
• Country: Japan
• Electron gun type : W Thermionic source
• Standard detectors : 4-segment BSE detector, UVD SE detector
• Optional detectors : STEM holder, Tilt & rotation stage, Cooling stage
• Cryo : Optional
• STEM : Optional
• STEM parameters: STEM holder for transmission imaging
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, AZtecLiveLite, Multi Zigzag, Recipe automation, Report Creator
• Electron optics : High-sensitivity BSE detector with low-vacuum function
• Beam current : High-current function enabled (Mode 5)
• Accelerating voltage : 5, 10, 15, 20 kV
• Image parameters : BSE, SE, Mixed (BSE+SE), Charge-up reduction
• Magnification : 10×–100,000× (photo), 25×–250,000× (monitor)
• Chamber : Max diameter 80 mm, height 50 mm
• Camera details : Image sizes: 2560×1920, 1280×960, 640×480; formats: BMP, TIFF, JPEG
• Stage parameters : X: 40 mm, Y: 35 mm; motorized stage (PlusIII), manual (TM4000III)
• Holder Types : STEM holder, tilt/rotation stage, cooling stage
• Sample size: Diameter 80 mm, height 50 mm
• Cooling system : Optional cooling stage (to –25 ℃)
• Vacuum system : Turbo molecular pump (67 L/s), diaphragm pump (20 L/min)
• Power Requirements and Consumption : Single phase AC100–240 V (Min 90 V, Max 250 V), 500 VA
• Environmental requirements : 15–30 ℃, ≤70% RH (no condensation)
• Dimensions and Weight: TM4000PlusIII: 330×614×547 mm, 55 kg; TM4000III: 330×617×547 mm, 53 kg