ToF-qSIMS Workstation

Hybrid SIMS system combining high-resolution ToF imaging and high-sensitivity quadrupole profiling.

• Status: Active
• Country: UK
• Isotopic: Yes
• Elemental: Yes
• Type of measurable elements: Most of elements, isotopes, and molecular species
• Measurable isotopes/elements: All elements, molecular ions, fragments (e.g., Pb, U, lanthanides, hydrocarbons)
• Analyzer type : Quadrupole MS (single)
• Analyzer type : Time-of-Flight MS
• Ion source type: IG20 O₂⁺, IG5C Cs⁺, FIB SIMS (optional), dual ion gun configuration
• Inlet types: Direct solid sample loading with custom bar and vacuum loadlock
• Mass range : 1–2000 amu (ToF), 1–500 amu (quadrupole)
• Mass resolution/ Mass resolving power : ~1500 m/Δm (ToF), separation of interferences (e.g., Si vs C₂H₄)
• Dynamic range : Up to 10⁷ (quadrupole); 10⁴–10⁵ (ToF imaging)
• Detection limits : <0.1 at% for SNMS mode; ppb for SIMS
• Precision : <1% for elemental dose (QSIMS), variable for surface organics (ToF)
• Primary beam : Cs⁺, O₂⁺ (1–5 keV), Ga⁺ (FIB optional)
• Voltage : 1–5 keV (ToF), down to ~500 eV (quadrupole)
• Spatial resolution : <1 µm in ToF hyperspectral mode; <100 nm (FIB-SIMS optional)
• Depth profile : Yes
• Beam energy : 0.5–5 keV (adjustable); multi-mode operation
• Camera : Yes (surface viewing, X/Y alignment, 3D imaging)
• Cooling system : Air cooled; no liquid cooling
• Vacuum system : UHV, dry-pumped, loadlock heater degas, cryotraps
• Power Requirements and Consumption : 2500 W, single phase