ZEM 20

Advanced desktop SEM with low vacuum mode, optional 5-axis stage, and high sample chamber volume

• Status: Active
• Country: China
• Electron gun type : W Thermionic source
• Optional detectors : SE, BSE, EDS (all optional)
• Cryo : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS (B–Cf), 129 eV resolution, 2048 channels, particle analysis
• Resolution : 5 nm
• Electron beam resolution : 5 nm
• Accelerating voltage : 20 kV
• Image parameters : 2048×2048 px; JPEG/TIFF/BMP; digital nav camera
• Magnification : Up to 360,000×
• Chamber : Sample table Ø 50 mm; sample size up to 80×100 mm; height up to 75 mm
• Camera details : Color digital navigation camera
• Stage parameters : XY: 60×60 mm; Z: manual/motorized; 5-axis option
• Sample size: Up to 80×100 mm
• Cooling system : Optional: Peltier or LN₂ stage
• Vacuum system : Membrane forevacuum pump; low vacuum mode supported
• Power Requirements and Consumption : 110–240 V, 50/60 Hz, 400 W
• Environmental requirements : 15–30 °C, ≤80% humidity
• Dimensions and Weight: 370×656×633 mm; 130 kg