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Installation specifications: EI scan S/N 600:1 S/N for turbo molecular pump system and 200:1 S/N for diffusion pump system will be given by 1-μL injection of 1-pg/μL (100:1 for 6850/5975C bundle) OFN2 standard scanning from 50 to 300 u at nominal 272 u ion.
PCI scan S/N (Methane) 125:1 S/N will be given by 1-μL injection of 100-pg/μL BZP3 standard scanning from 80 to 230 u at nominal 183 u ion.
NCI scan S/N (Methane) 600:1 S/N will be given by 2-μL injection of 100 fg/μL OFN standard scanning from 50 to 300 u at nominal 272 u ion.
Vacuum system: Turbomolecular Pump
Power Requirements and Consumption: 110-240V, 50/60 Hz