AURA 200

Advanced compact SEM. Designed to minimize EMI and vibration. 2-stage lens system.

• Status: Active
• Country: South Korea
• Electron gun type : W Thermionic source
• Standard detectors : SE
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : AOI Tool
• Electron optics : 2-Stage Lens (CL & OL)
• Resolution : < 7nm @ 20KeV
• Accelerating voltage : From 1kV
• Image parameters : Area Mode(640x480), Photo(3840x2880)
• Magnification : 100,000X + Digital Zoom 2X, 4X
• Stage parameters : X,Y(40mm) / Z(530mm) / Rotation(360°) / Tilt(045°)
• Aberration Correction type : Aberration reduction optic design
• Power Requirements and Consumption : 220–230V AC, 5KW, 50/60Hz
• Environmental requirements : 22±2°C, Humidity < 70%
• Vibration, Magnetic, Noise tolerance : 3μm/sec @ 5–10Hz; EMI compliant
• Dimensions and Weight: 360(W) × 440(D) × 580(H) mm