AA6000 mini

Desktop multi-purpose SEM. High performance in all SEM modes & particle counting. Easy operation in a multi-user environment.

• Status: Active
• Country: USA
• Electron gun type : W Thermionic source
• Standard detectors : High Sensitivity SE Detector
• Optional detectors : EDS, BSE, etc.
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Particle counter (Blob Analysis), measurement tools, filters, AOI, tiling
• Resolution : 5 nm @ 30 kV SE
• Electron beam resolution : 5 nm
• Beam current : 1 pA – 8 µA
• Accelerating voltage : 0.6 – 20 kV (Max 30 kV)
• Image parameters : Area (320×240), Inspection (640×480), Photo (1280×960 to 5120×3840, option up to 8192×6144)
• Magnification : 10X – 150,000X (optional 200,000X), Digital Zoom ×2/×4/×8
• Camera details : 22” LCD display
• Stage parameters : 5-axis: X/Y/Z = 40 mm, Rotation = 360°; Tilt 0–90° optional; stage motorization optional
• Vacuum system : Rotary + Turbo Pump; Full automation/manual mode; Pirani + Penning Gauge