AA7000

Multi-user SEM. High performance in all SEM modes & particle counter. Combines versatility and flexibility with ease of use.

Multi-user SEM. High performance in all SEM modes & particle counter. Combines versatility and flexibility with ease of use.

Status: Active
Country: USA
Electron gun type : W Thermionic source
Standard detectors : High Sensitivity SE Detector
Optional detectors : EDX, WDX, etc.
Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Particle counter (Blob Analysis), measurement tools, filters, AOI, tiling
Resolution : 3 nm @ 30 kV SE
Electron beam resolution : 3 nm
Beam current : 1 pA – 8 µA
Accelerating voltage : 0.6 – 30 kV
Image parameters : Area (640×480), Inspection (up to 2048×1536), Photo (2048×1536 to 8192×6144)
Magnification : 10X – 300,000X, Digital Zoom ×2/×4/×8
Chamber : Dia 810 × 190 (H) mm, ports for SE, BSE, EDS, CCD
Camera details : 22” LCD display
Stage parameters : 5-axis: X/Y/Z = 40 mm, Tilt: 0–60°, Rotation = 360°; motorization optional
Vacuum system : Rotary + Turbo Pump; Full automation/manual mode; Pirani + Penning Gauge
Environmental requirements : Air or gas (e.g., N₂) supply required for anti-vibration system
Vibration, Magnetic, Noise tolerance : Air-cylinder anti-vibrator included