Sigma​ 500

High-end field emission SEM with best-in-class EDS geometry. Offers advanced analytical microscopy and automation

• Status: Active
• Country: Germany
• Electron gun type : Schottky FEG
• Standard detectors : Inlens SE, Inlens Duo, ETSE, HD BSD
• Optional detectors : AsB, VPSE-G4, C2D, HDBSD, YAG-BSD, BSD4, MMSTEM, aSTEM, CL, 3DSEM, EDS, EBSD, WDS
• Cryo : Optional
• STEM : Optional
• STEM parameters: aSTEM: brightfield, darkfield, HAADF modes
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, 3DSM, SmartPI, Atlas 5, 3View, Shuttle & Find
• Electron optics : Gemini column with Nano-twin lens; beam booster; Inlens Duo detector and advanced detection geometry
• Resolution : 0.8 nm at15 kV, 1.6 nm at1 kV
• Optical column : Gemini objective with electrostatic and magnetic fields
• Electron beam resolution : 0.8–1.6 nm
• Beam current : 12 pA – 20 nA (40 nA and 100 nA optional)
• Accelerating voltage : 0.02 – 30 kV
• Image parameters : SE, BSE, high-contrast, 3D metrology, SmartBrowse, automated mapping, enhanced VP imaging
• Magnification : 10× – 1,000,000×
• Chamber : 14 accessory ports
• Camera details : Image framestore: 32k × 24k pixels
• Stage parameters : 5-axis eucentric stage: X/Y: 130 mm, Z: 50 mm, Tilt: –3° to +70°, Rotation: 360° (Cartesian stage optional)
• Holder Types : Supports eucentric and Cartesian holders; large samples up to 5 kg
• Sample size: Up to 150 mm height and 5 kg with Cartesian stage
• Vacuum system : High vacuum and variable pressure (2–133 Pa)
• Vibration, Magnetic, Noise tolerance : Beam booster minimizes stray field sensitivity