Superscan SS-4000

Field-free analytical UHR SEM; BrightBeam technology for low-energy high-resolution imaging; Optimized for sensitive materials

• Status: Active
• Country: Japan
• Electron gun type : Schottky FEG
• Standard detectors : In-Beam axial detector (SE/BSE), Multi In-Beam detector (SE/BSE), In-Chamber E-T detector (SE), In-Chamber LE-BSE, GSD detector
• Optional detectors : LE-4Q BSE, Al-Coated BSE, HADF R-STEM, Dual EDS, Raman spectroscopy, Cryo system, WDS, EBSD, SBFI, Array Tomography, 3D Volume Analysis
• Cryo : Yes
• STEM : Optional
• STEM parameters: HADF R-STEM
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, WDS, EBSD, Raman, CL, heating stage, SBFI
• Electron optics : BrightBeam and Wide Field Optics with field-free lens system
• Resolution : 0.8–3.0 nm depending on voltage and mode
• Optical column : Electromagnetic and electrostatic lens combo
• Beam current : 2 pA – 400 nA
• Accelerating voltage : 0.05 – 30 keV
• Image parameters : Wide Field SEM, rotation-free high magnification, real-time viewing
• Magnification : 2x – 2,000,000x
• Chamber : LMH: Ø230 mm; GMU: large chamber with MultiVac
• Camera details : Max 16k × 16k pixel
• Stage parameters : 5-axis compucentric: X, Y, Z, R (360°), T (±80°)
• Sample size: Max 180 mm diameter, 92 mm height (LMH); 100 mm diameter, 39 mm height (GMU)
• Aberration Correction type : In-flight beam tracking and 4-sec auto correction
• Cooling system : Cryo-SEM option, water-cooled BSE
• Vacuum system : MultiVac mode (7 – 500 Pa); Plasma cleaner
• Power Requirements and Consumption : 200V, 50/60Hz, 2500VA with transformer
• Environmental requirements : 17–24°C, ≤65% RH, ≤300 nT magnetic field
• Vibration, Magnetic, Noise tolerance : <5–20 µm/s (pneumatic or active depending on frequency)
• Dimensions and Weight: Body: 1850 mm, 420–580 kg; Rack: 1092 mm, 125 kg; Transformer: 320 mm, 24 kg