EM69

Tungsten filament SEM with 3nm resolution at 30kV. Supports low vacuum and modular stage options. Interfaces for detectors and SEM+ tools.

• Status: Active
• Country: China
• Electron gun type : W Thermionic source
• Standard detectors : Secondary Electron Detector; Semiconductor BSE Detecto; Infrared CCD
• Optional detectors : Low-vacuum SED※; Low-vacuum BSED※
• Cryo : Optional
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : LaB6; EDS; EBSD; CL; WDS
• Resolution : SE: 3nm@30kV, 8nm@3kV; BSE: 4nm@30kV
• Electron beam resolution : SE: 3nm@30kV, 8nm@3kV
• Accelerating voltage : 0.2kV–30kV
• Magnification : 1x–450000x
• Chamber : Optional Big size chamber; multiple interface at chamber
• Camera details : Infrared CCD; Wide field navigation camera
• Stage parameters : Five Axes Stage: X: 0–80mm, Y: 0–50mm, Z: 0–30mm, R: 360°, T: -5° to 70°
• Sample size: Max Diameter: 175mm
• Cooling system : Cooling Stage (modification option) ⇒ Optional
• Vacuum system : Turbo Molecular pump + Mechanical pump