LaB6

Premium normal SEM with LaB6. Optimized for resolving power and imaging large samples.

• Status: Active
• Country: South Korea
• Electron gun type : LaB₆ Thermionic source
• Standard detectors : ET-Type SE Detector (SE-BSE mode)
• Optional detectors : BSE, EDS, WDS, EBSD, TSEM, Load-lock Chamber
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Particle Counter, Blob Analysis, 3D-View, AOI, Histogram
• Electron optics : 65° conical objective lens
• Resolution : 2.0 nm @ 30kV SE, 3.0 nm BSE
• Optical column : 65° conical objective lens
• Accelerating voltage : 0.6 – 30kV (min. 0.2kV)
• Image parameters : Up to 8192×6144
• Magnification : 10× – 1,000,000×
• Chamber : Optional large stage & chamber
• Camera details : Optional CCD
• Stage parameters : X/Y/Z: 60/70/65 mm; Tilt: -20° to 60° (max. 90°); Rotation: 360° Endless
• Aberration Correction type : Yes (via conical lens design)
• Vacuum system : Rotary + Turbo + Ion Pump; High and Low vacuum
• Power Requirements and Consumption : 220–230V AC, 5KW, 50/60Hz
• Environmental requirements : 22±2°C, Humidity < 70%
• Vibration, Magnetic, Noise tolerance : 3μm/sec @ 5–10Hz; EMI compliant