HEM6000

High-speed SEM with high-brightness Schottky emitter, automated operation, and cross-scale imaging capabilities

• Status: Active
• Country: China
• Electron gun type : Schottky FEG
• Standard detectors : In-lens electron detector
• Optional detectors : BSED, STEM, plasma cleaner, loadlock, AI noise reduction, etc.
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : AI denoising, 3D recon, FOV stitching
• Electron optics : Immersion electromagnetic & electrostatic combo objective lens
• Resolution : 1.5 nm @ 1 kV SE; 1.8 nm @ 1 kV BSE; 1.5 nm @ 15 kV BSE
• Optical column : Immersion electromagnetic & electrostatic combo lens
• Electron beam resolution : 1.5 nm – 1.8 nm depending on mode
• Accelerating voltage : 0.1 – 30 kV (Decel: 0.1–6 kV, Non-decel: 6–30 kV)
• Image parameters : 16K×16K; 10 ns/pixel dwell time; 2×100 M pixel/s acquisition
• Magnification : 66 – 1,000,000×
• Chamber : Horizontal and vertical monitoring cameras; automatic loadlock
• Camera details : Optical + chamber monitoring cameras
• Stage parameters : Motorized 3-axis; X,Y: 110 mm; Z: 16 mm; optional piezo-driven
• Holder Types : 4-inch sample support
• Sample size: Max 4 inches in diameter
• Vacuum system : Fully automatic oil-free system
• Vibration, Magnetic, Noise tolerance : Optional anti-vibration platform