VEGA Compact

Compact SEM with touchscreen interface. Automated SEM operation. Designed for ease-of-use and fast sample turnaround.

Compact SEM with touchscreen interface. Automated SEM operation. Designed for ease-of-use and fast sample turnaround.

Status: Active
Country: Czechia
Electron gun type : W Thermionic source
Standard detectors : SE detector, BSE detector
Optional detectors : EDX, EBSD, LVSTD, STEM
Cryo : Optional
STEM : Optional
STEM parameters: HAADF, BF/DF with retractable STEM
Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDX, EBSD, 3D metrology, EasyEDX
Electron optics : Wide Field Optics system with automated alignment
Resolution : 3.5 nm at 30 keV
Optical column : Intermediate Lens with full auto column alignment
Electron beam resolution : 3.5 nm
Beam current : 1 pA – 2 µA
Accelerating voltage : 200 eV – 30 keV
Image parameters : 16,384×16,384 pixels, real-time imaging with 3D topography
Magnification : 3× – 1,000,000×
Chamber : SB: 160 mm, LM: 230 mm
Camera details : IR camera (optional), integrated touchscreen
Stage parameters : SB: 3-axis, LM: 5-axis, Z: up to 147 mm
Holder Types : Multi-specimen holder (standard), optional specialized holders
Sample size: Up to 300 mm diameter, 147 mm tall
Cooling system : Optional Peltier cooling stage
Vacuum system : High and low vacuum with UniVac up to 2000 Pa
Power Requirements and Consumption : 230 V ±10%, 1300 VA
Environmental requirements : Standard lab environment, vibration isolation available
Vibration, Magnetic, Noise tolerance : Integrated vibration isolation (GM chamber)