Crossbeam 550

High-throughput SEM-FIB for demanding samples. Double condenser Gemini II column with enhanced resolution and automated TEM prep workflows

• Status: Active
• Country: Germany
• Electron gun type : Schottky FEG
• Standard detectors : Inlens SE, Inlens EsB, ETD, SESI, aSTEM, aBSD, CL
• Optional detectors : EDS, EBSD, WDS, SIMS, ToF-SIMS
• Cryo : Optional
• FIB: Yes
• STEM : Yes
• STEM parameters: aSTEM with BF, DF, HAADF; annular backscatter for high contrast
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : 3D EDS, 3D EBSD, Atlas 5 tomography, SmartEPD, ToF-SIMS, Raman (via CCD), Samplefab for automated multi-site lamella prep
• Electron optics : Gemini II column with double condenser and Inlens SE and EsB detectors
• Resolution : 0.7 nm at15 kV; 1.3 nm at1 kV with Tandem decel; 1.6 nm at200 V with Tandem decel
• Optical column : Gemini II with enhanced beam booster and dual condenser
• Electron beam resolution : 0.6–2.3 nm depending on mode and voltage
• Beam current : 10 pA – 100 nA
• Image parameters : 3D tomography, multi-detector simultaneous imaging, high contrast SE and BSE, Atlas 5 support
• Magnification : Up to 50k × 40k pixels with Atlas 5
• Chamber : 18 configurable ports (standard); 22 (large chamber)
• Camera details : Optional airlock navigation camera
• Stage parameters : X/Y: 100 mm (optional 153/202 mm), Z: 50 mm, Tilt: –15° to +70°, Rotation: 360°, Z′: 20 mm
• Holder Types : Compatible with standard, heating, cryo, aSTEM, etc.
• Sample size: Up to 8" wafer possible via large airlock
• Vacuum system : FIB: LMIS Ga source, lifetime >3000 µAh; dry pumping; optional variable pressure