SU8600

Cold-FE SEM with ExB filter for high S/N, comprehensive detectors, dual-screen imaging, and recipe-driven automation.

Cold-FE SEM with ExB filter for high S/N, comprehensive detectors, dual-screen imaging, and recipe-driven automation.

Status: Active
Country: Japan
Electron gun type : Cold FEG
Standard detectors : UD, LD, PD-BSED, IMD
Optional detectors : EDS, EBSD, STEM, CLD, OCD, TD
Cryo : Optional
STEM : Yes
STEM parameters: BF/DF STEM with high-resolution detectors
Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, STEM, ExB/CL, EM Flow Creator
Electron optics : Cold FE source with ExB and SuperExB signal mixing
Resolution : 0.6 nm at15 kV, 0.7 nm at1 kV
Electron beam resolution : 0.6–0.7 nm
Accelerating voltage : 0.5–30 kV
Image parameters : SE, BSE, STEM, CL, 6-signal simultaneous display
Magnification : 20–2,000,000×
Chamber : Max. Ø150 mm
Camera details : 640×480 to 5,120×3,840 and 40,960×30,722
Stage parameters : 5-axis motor, X/Y/Z: 0–110 mm, Tilt: –5° to 70°, Rot: 360°
Sample size: Up to Ø150 mm
Aberration Correction type : ExB/SuperExB field with high beam control
Cooling system : Dedicated cooling system
Vacuum system : Dry pump
Power Requirements and Consumption : 4 kVA, AC100–240 V
Environmental requirements : 15–25 °C, ≤60% RH
Dimensions and Weight: 1,130×1,100×1,750 mm, 660 kg