JIB-4700F

Multi Beam System with seamless observation and analysis, 3D imaging, cryo and EBSD/EDS capabilities

• Status: Active
• Country: Japan
• Electron gun type : Schottky FEG
• Standard detectors : LED, UED
• Optional detectors : EDS, EBSD, TED, BED, USD, GIS, IR camera
• Cryo : Optional
• FIB: Yes
• STEM : Yes
• STEM parameters: STEM holder with BF/DF capability
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : 3D-EDS, 3D-EBSD, cryo prep, vector scan, pick-up and stage linkage systems
• Electron optics : In-lens Schottky electron gun, aperture angle control lens (ACL), hybrid conical lens
• Resolution : SEM: 1.2 nm (15 kV GB mode), 1.6 nm (1 kV GB mode), FIB: 4.0 nm (30 kV)
• Optical column : Super conical hybrid lens with electromagnetic and electrostatic fields
• Electron beam resolution : SEM: 1.2–1.6 nm
• Beam current : SEM: 1 pA to 300 nA, FIB: 1 pA to 90 nA
• Accelerating voltage : SEM: 0.1–30 kV, FIB: 1.0–30 kV
• Image parameters : SE, BE, STEM, 3D-EDS, 3D-EBSD, elemental/crystal orientation maps
• Magnification : SEM: ×20 to ×1,000,000; FIB: ×100 (×50) to ×300,000
• Chamber : Large chamber with multiple detector ports
• Camera details : IR chamber camera, overlay software for external images
• Stage parameters : Tilt: –38° to +52° for FIB, full goniometer stage
• Holder Types : STEM holder, Shuttle retainer holder, 2-inch bulk, 3D-EBSD holder
• Cooling system : Water: 0.5 L/min, 0.1–0.25 MPa, 20°C ±5°C; Nitrogen: 0.45–0.55 MPa
• Vacuum system : TMP + Rotary Pump, automatic
• Power Requirements and Consumption : Single phase 200 V ±10%, 50/60 Hz, 6 kVA
• Environmental requirements : Humidity ≤60%, 3,000×3,200 mm room, height ≥2,700 mm
• Dimensions and Weight: Footprint: 3,000 mm × 3,200 mm or more