Helios 6 HD

High-throughput, high-quality TEM sample prep; Automated workflows with AutoTEM 6; Optimized for semiconductor FA and R&D

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• FIB: Yes
• STEM : Yes
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : AutoTEM 6, Auto Slice & View
• Electron optics : Schottky thermal field emitter
• Resolution : 0.6 nm at 2–15 kV; 0.7 nm at 1 kV; 1.0 nm at 500 V
• Electron beam resolution : 0.6 nm at 15 kV; 1.2 nm at 1 kV (coincident)
• Accelerating voltage : SEM: 20 V–30 kV; FIB: 500 V–30 kV
• Stage parameters : 5-axis, all-piezo motorized; Auto-QuickFlip shuttle
• Holder Types : EasyLift NanoManipulator
• Sample size: 36 mm × 66 mm
• Vibration, Magnetic, Noise tolerance : Piezo stage; digital scan engine for stability