Scios 2

The most versatile high-performance DualBeam instrument

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : T1, T2, ETD, ICE, IR cam, Nav-Cam, STEM 3+ (BF/DF/HAADF), DBS
• Optional detectors : STEM 3+ detector, DBS, ICE, in-column T3
• Cryo : Optional
• FIB: Yes
• STEM : Optional
• STEM parameters: BF/DF/HAADF segments
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, CL
• Electron optics : NICol electron column: ultra-high resolution non-immersion field emission-SEM column
• Resolution : 0.7 nm at 30 keV STEM; 1.4 nm at 1 keV; 1.2 nm at 1 keV with beam deceleration
• Optical column : Dual objective lens (electromagnetic + electrostatic)
• Electron beam resolution : 0.7 nm at 30 keV STEM; 1.4 nm at 1 keV
• Beam current : 1 pA to 400 nA
• Accelerating voltage : 200 V – 30 kV
• Image parameters : 6144×4096 px; 25 ns to 25 ms/pixel
• Chamber : 379 mm width, 21 ports, <6.3×10⁻⁶ mbar vacuum
• Camera details : IR camera; Nav-Cam
• Stage parameters : 5-axis motorized, XY: 110 mm, Z: 65 mm, Tilt: -15° to +90°, 360° rotation
• Holder Types : Multi-purpose holder, wafer/custom holders
• Sample size: 110 mm with full rotation
• Cooling system : Optional μHeater, Cryo solutions
• Vacuum system : Oil-free; <6.3×10⁻⁶ mbar
• Environmental requirements : Acoustic enclosure option available
• Vibration, Magnetic, Noise tolerance : Acoustic enclosure available