SEM3200

Compact tungsten filament SEM with high-resolution imaging, wide voltage range, and analytical functions

• Status: Active
• Country: China
• Electron gun type : W Thermionic source
• Standard detectors : ET detector, BSE detector
• Optional detectors : STEM, EDS, EBSD
• Cryo : Optional
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, STEM
• Electron optics : Magnetic/electrostatic lens, ET and BSE detection
• Resolution : 3.0 nm @ 30 kV (SE), 4.0 nm @ 3 kV (SE), 4.0 nm @ 30 kV (BSE), 5.0 nm @ 3 kV (BSE)
• Electron beam resolution : 2.0–6.0 nm depending on voltage and detector
• Accelerating voltage : 200 V – 30 kV
• Image parameters : Auto contrast, brightness, dynamic focus, auto stigmator
• Magnification : 10× – 1,000,000×
• Chamber : Mid-size chamber with multiple ports
• Camera details : Dual camera (navigation and chamber view)
• Stage parameters : 5-axis: X/Y = 80 mm, Z = 40 mm, Tilt = –10° to +90°, Rotation = 360°
• Holder Types : Multi-specimen stub holder
• Vacuum system : High vacuum; optional low vacuum mode