Scios 3

Ultra-high-resolution analytical-focused ion beam scanning electron microscope (FIB-SEM).

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : T1 BSE, T2 SE, ETD, IR Cam
• Optional detectors : T3 in-column SE, ICE, DB, STEM 3 , Nav-Cam (optional)
• Cryo : Optional
• FIB: Yes
• STEM : Optional
• STEM parameters: BF/DF/HAADF segments
• Additional analytical capabilities : EDS, EBSD, WDS, CL
• Electron optics : NICol ultra-high resolution FE-SEM column; dual objective lens (electromagnetic electrostatic); heated automated apertures, auto alignment, double stage deflection, user guidance presets
• Resolution : 0.7 nm at 30 keV STEM; 1.4 nm at 1 keV; 1.2 nm at 1 keV with beam deceleration
• Optical column : Dual objective lens (electromagnetic + electrostatic)
• Electron beam resolution : 0.7 nm at 30 keV STEM; 1.4 nm at 1 keV
• Beam current : 1 pA to 400 nA
• Accelerating voltage : 200 V – 30 kV, with optional low-energy down to 20 eV
• Image parameters : up to 64k×64k px; TIFF/BMP/JPEG; advanced scanning (SmartSCAN, Drift Compensation)
• Chamber : 379 mm width, 21 ports, <6.3×10⁻⁶ mbar; chamber evacuation <3.5 min
• Camera details : IR camera; Nav-Cam (optical)
• Stage parameters : 5-axis, XY 110 mm, Z 65 mm, Tilt –38° to 90°, rotation endless 360°; supports up to 5 kg sample
• Holder Types : Multi-purpose holder; 18 stubs; STEM holders; wafer/custom
• Sample size: 110 mm with full rotation
• Cooling system : CryoMAT Kit, CryoCleaner, external cryo
• Vacuum system : Oil-free; <6.3×10⁻⁶ mbar
• Vibration, Magnetic, Noise tolerance : Acoustic enclosure available