SEMIRON 5000

High-resolution FE-SEM. Fast scan speed, multitasking GUI, and strong image analysis features.

• Status: Active
• Country: South Korea
• Electron gun type : Schottky FEG
• Standard detectors : ET-Type SE Detector (SE-BSE mode), CCD
• Optional detectors : BSE, EDS, WDS, EBSD, TSEM, Load-lock Chamber
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : Particle Counter, Blob Analysis, 3D-View, AOI, Histogram
• Electron optics : Electromagnetic + Electrostatic, 60° conical objective lens
• Resolution : 1.0 nm @ 30kV SE, 2.0 nm BSE
• Optical column : 60° conical objective lens
• Accelerating voltage : Up to 30kV (continuous)
• Image parameters : Area Mode(640×480) to Photo Mode(8192×6144)
• Magnification : 10× – 1,000,000×
• Chamber : Optional large stage & chamber
• Camera details : CCD included
• Stage parameters : X/Y/Z: 50/70/65 mm; Tilt: ~60° (max. 90°); Rotation: 360° Endless
• Aberration Correction type : Yes (via conical lens design)
• Vacuum system : Rotary + Turbo + Ion Pump; High vacuum
• Power Requirements and Consumption : 220–230V AC, 5KW, 50/60Hz
• Environmental requirements : 22±2°C, Humidity < 70%
• Vibration, Magnetic, Noise tolerance : 3μm/sec @ 5–10Hz; EMI compliant