Axia ChemiSEM

Next-generation SEM with integrated EDS for live elemental mapping. Streamlined for rapid analysis and real-time compositional information. Suitable for industrial and academic applications.

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : ETD, BSED, IR, Nav-Cam, LVD, TrueSight X EDS
• Optional detectors : RGB-CL, EBSD, CL, Raman
• Cryo : Optional
• STEM : Optional
• STEM parameters: BF, DF, HAADF (STEM 3+)
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, CL, Raman
• Electron optics : Thermal emission (tetrode), differential pumping, 45° lens, fully auto alignment
• Resolution : 3.0 nm at 30 kV (SE); 10 nm at 3 kV (SE, low vacuum)
• Optical column : Thermal SEM column with tetrode geometry
• Electron beam resolution : 3.0 nm at 30 kV; 7.0 nm at 3 kV (BD); 10 nm at 3 kV (LVD)
• Beam current : Up to 2 µA
• Accelerating voltage : 200 V – 30 kV
• Image parameters : 50 ns – 25 ms; up to 6144×4096 px
• Magnification : 5× – 1,000,000× (Polaroid)
• Chamber : 280 mm width; 5 ports w/ BSED + EDS config; 10 mm WD
• Camera details : IR camera; Nav-Cam (optical)
• Stage parameters : XY: 120×120 mm; Z: 55 mm; Tilt: -15°/+90°; Up to 10 kg (ZTR removed)
• Holder Types : 7 stub holder, single stub holder
• Sample size: 138 mm diameter max
• Cooling system : Optional CleanHeater stage, Cryo stage
• Vacuum system : TMP + PVP; <2 min evac to HV; ≤4.5 min to LV (150 Pa)
• Power Requirements and Consumption : 100–240 V; <2.0 kVA
• Environmental requirements : 17–27°C; RH <70%; magnetic fields <100/300 nT; weight: 405 kg
• Vibration, Magnetic, Noise tolerance : <68 dBC; active vibration table optional
• Dimensions and Weight: 405 kg column console