Veritas LaB6

High-resolution big-chamber SEM with LaB₆ source, long stage movement, and advanced automation

High-resolution big-chamber SEM with LaB₆ source, long stage movement, and advanced automation

Status: Active
Country: USA
Electron gun type : W Thermionic source
Standard detectors : SE Detector (ET-type)
Optional detectors : EDS, EBSD, WDS, CL, Raman, 3D Imaging, E-beam Lithography, Chamber Camera
Cryo : Optional
STEM : Optional
Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, CL, Raman, E-beam Lithography, 3D Imaging
Electron optics : Big chamber optics with SE detection and beam shift 100 μm
Resolution : 2.0 nm (SE)
Electron beam resolution : 2.0 nm
Accelerating voltage : 200 V – 30 kV
Image parameters : Focus, preview, slow, and photo modes; 3200×2400 max; auto brightness/focus/filament
Magnification : ×10 – ×300,000
Chamber : 210 mm (D) × 65 mm (H)
Camera details : Internal monitoring camera
Stage parameters : 5-axis Motorized: X/Y: 120 mm, Z: 5–65 mm, Tilt: –20° ~ +90°, Rotation: 360°
Sample size: 210 mm (D) × 65 mm (H)
Vacuum system : Turbo pump + rotary vane pump, auto valve system; vacuum ready in 3 minutes
Power Requirements and Consumption : 100 – 240 VAC, 50/60 Hz, 1 kVA
Dimensions and Weight: 800 × 825 × 1500 mm, 230 kg