EM8200

Schottky FEG SEM with 1.5nm SE resolution at 15kV. Includes five-axis stage and 175mm sample capacity. Supports multiple detectors and modular accessories.

• Status: Active
• Country: China
• Electron gun type : Schottky FEG
• Standard detectors : High Vacuum SE Detector; Infrared CCD; Four-quadrant BSE Detector; Optical navigation
• Optional detectors : EDS; EBSD; STEM; CL; Heating Stage; Cooling Stage; Tensile Stage
• Cryo : Optional
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS; EBSD; STEM; CL
• Electron optics : Multi-stage high performance lens system
• Resolution : SE 1.5nm@15kV, BSE 3nm@30kV
• Electron beam resolution : SE 1.5nm@15kV
• Accelerating voltage : 0.2kV–30kV
• Magnification : 1x–600000x
• Chamber : Customizable extra-large sample chamber
• Camera details : Infrared CCD; Optical navigation ※
• Stage parameters : Five axes: X:0–80mm, Y:0–50mm, Z:0–30mm, R:360°, T:-5° to 70°
• Sample size: Max diameter: 175mm
• Cooling system : Cooling Stage ⇒ Optional
• Vacuum system : 2 Ion Pumps, 1 Magnetic Levitation Turbo Molecular Pump, 1 Dry Pump