JSM-IT510

Tungsten SEM with large multipurpose chamber. Equipped with embedded EDS, optional cryo holder, and automation for routine imaging.

• Status: Active
• Country: Japan
• Electron gun type : Schottky FEG
• Standard detectors : SED, BED, EDS
• Optional detectors : LHSED, LVSED, WDS, EBSD
• Cryo : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, WDS, EBSD, LHSED, 3D analysis
• Electron optics : Fully automatic gun alignment
• Resolution : 3.0 nm (30 kV), 15.0 nm (1.0 kV); 4.0 nm (30 kV BED) in low vacuum
• Beam current : 1 pA to 1 μA
• Accelerating voltage : 0.3 to 30 kV
• Image parameters : 640×480 to 5120×3840 px
• Magnification : ×5 to ×300,000 (photo); ×14 to ×839,724 (display)
• Chamber : Multi-purpose chamber with 11 ports
• Camera details : Optional chamber scope
• Stage parameters : X: 125 mm, Y: 100 mm, Z: 80 mm, Tilt: -10°–90°, Rotation: 360°
• Holder Types : Dual EDS, large/tall samples, cryo holder
• Sample size: Max Ø200 mm, H: 80 mm
• Cooling system : Optional cryo stage
• Vacuum system : TMP ×1, RP ×1 or 2
• Power Requirements and Consumption : 100 V AC, 50/60 Hz, 3.0 kVA
• Environmental requirements : 20 ±5°C, ≤60% RH, ≤0.3 μT
• Vibration, Magnetic, Noise tolerance : ≤0.3 μT
• Dimensions and Weight: EOS column: 750 × 1000 × 1470 mm, 405 kg