Apreo 2 SEM

High-res FEG SEM with SmartAlign and ChemiSEM; Sub-nanometer imaging; Suitable for versatile research labs

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : Trinity detection: T1, T2, ETD, DBS, IR, Nav-Cam
• Optional detectors : STEM 3+, DBS, Low-vacuum SE, DBS-GAD
• Cryo : Optional
• STEM : Optional
• STEM parameters: STEM 3+ detector (BF, DF, HADF, HAADF)
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, CL, Raman
• Electron optics : Schottky FEG, compound lens (electrostatic + immersion), SmartAlign, through-the-lens differential pumping
• Resolution : 0.5 nm at 15 kV (compound lens); 0.8 nm at 1 kV (BD); 1.2 nm at 200 V (BD)
• Optical column : Field emission SEM column
• Electron beam resolution : 0.5 nm at 15 kV (BD); 0.9 nm at 1 kV; 1.2 nm at 200 V (BD)
• Beam current : 1 pA – 50 nA (400 nA optional config)
• Accelerating voltage : 200 V – 30 kV
• Image parameters : 25 ns – 25 ms/pixel; up to 6144×4096 px
• Chamber : 340 mm width; 12 ports; 10 mm WD; EDS take-off 35°
• Camera details : IR camera, Nav-Cam Camera
• Stage parameters : XY: 110×110 mm; Z: 65 mm; Tilt: -15°/+90°; Up to 5 kg at 0° tilt
• Holder Types : 18 stubs; 3 pre-tilted; STEM grids; wafer/custom
• Sample size: 122 mm diameter
• Cooling system : System chiller
• Vacuum system : Oil-free; 240 l/s TMP; Low-vac: 10–500 Pa; HiVac: <6.3×10⁻⁶ mbar
• Power Requirements and Consumption : 100–240 V; <3.0 kVA
• Environmental requirements : 20°C ±3°C; RH <80%; magnetic field & vibration specs
• Vibration, Magnetic, Noise tolerance : Stray AC magnetic fields <40 nT async, <100 nT sync
• Dimensions and Weight: Console: 980 kg