Sigma 300

Field emission SEM offering performance and price balance. Based on Gemini technology. Designed for nanostructures, coatings, layers, and thin films

Field emission SEM offering performance and price balance. Based on Gemini technology. Designed for nanostructures, coatings, layers, and thin films

Status: Active
Country: Germany
Electron gun type : Schottky FEG
Standard detectors : Inlens SE, ETSE, HD BSD
Optional detectors : AsB, VPSE-G4, C2D, HDBSD, YAG-BSD, BSD4, MMSTEM, aSTEM, CL, 3DSEM, EDS, EBSD, WDS
Cryo : Optional
STEM : Optional
STEM parameters: aSTEM: brightfield, darkfield, HAADF modes
Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, 3DSM, SmartPI, Atlas 5, 3View, Shuttle & Find
Electron optics : Gemini column with electrostatic and magnetic fields; beam booster; Inlens SE detector
Resolution : 1.2 nm at15 kV, 2.2 nm at1 kV
Optical column : Gemini objective with electrostatic and magnetic fields
Electron beam resolution : 1.2–2.2 nm
Beam current : 12 pA – 20 nA (40 nA and 100 nA optional)
Accelerating voltage : 0.02 – 30 kV
Image parameters : SE, BSE, high-contrast, 3D metrology, SmartBrowse, automated mapping
Magnification : 10× – 1,000,000×
Chamber : 10 accessory ports
Camera details : Image framestore: 3k × 2k pixels
Stage parameters : 5-axis compucentric stage: X/Y: 125 mm, Z: 50 mm, Tilt: –10° to +90°, Rotation: 360°
Holder Types : Supports standard holders
Vacuum system : High vacuum and variable pressure (2–133 Pa)
Vibration, Magnetic, Noise tolerance : Beam booster minimizes stray field sensitivity