VEGA 3

Versatile SEM with advanced LaB₆ or tungsten optics. High and low vacuum imaging. Suitable for analytical, forensic, and biological work.

• Status: Active
• Country: Czechia
• Electron gun type : W Thermionic source
• Standard detectors : SE (Everhart-Thornley), YAG BSE detector
• Optional detectors : EDX, EBSD, LVSTD, 3D, STEM
• Cryo : Optional
• STEM : Optional
• STEM parameters: HAADF, BF/DF with retractable STEM
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDX, EBSD, WDS, EasyEDX, 3D tomography, correlative microscopy
• Electron optics : Wide Field Optics with Intermediate Lens, optimized for LaB₆ or tungsten emitter
• Resolution : 3 nm at 30 keV (Tungsten), 2 nm at 30 keV (LaB₆)
• Optical column : Intermediate Lens with beam shaping optics
• Electron beam resolution : 2–3 nm depending on source
• Beam current : 1 pA – 2 µA
• Accelerating voltage : 200 eV – 30 keV
• Image parameters : 16,384×16,384 pixels, In-Flight Beam Tracing, EasyEDX
• Magnification : 3× – 1,000,000× (SB), 2× – 1,000,000× (LM)
• Chamber : SB: 160 mm, LM: 230 mm, GM: 340×315 mm
• Camera details : Optional IR camera, dual monitor support
• Stage parameters : SB: 3-axis, LM: 5-axis, GM: 5-axis with 147 mm Z travel
• Holder Types : Multi-sample stub holder, thin section holder, large sample holder
• Sample size: Up to 300 mm diameter, 147 mm tall
• Cooling system : Optional Peltier cooling stage
• Vacuum system : High and low vacuum with UniVac up to 2000 Pa
• Power Requirements and Consumption : 230 V, standard, with forevacuum pump
• Environmental requirements : Standard lab environment, vibration isolation available
• Vibration, Magnetic, Noise tolerance : Integrated vibration isolation (GM chamber)
• Dimensions and Weight: Depends on chamber config (GM chamber largest)