MIRA

High-resolution analytical SEM for routine materials characterization, quality control, and sub-micron analysis

• Status: Active
• Country: Czechia
• Electron gun type : Schottky FEG
• Standard detectors : Everhart-Thornley SE, GSD (MultiVac mode)
• Optional detectors : In-Beam SE/BSE, R-BSE, LE-BSE, STEM, CL, Rainbow CL, EDS, EBSD, WDS, Raman
• Cryo : Optional
• STEM : Optional
• STEM parameters: BF, DF, HADF sectors; up to 8 grid holders
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, CL, STEM, Raman
• Electron optics : Intermediate Lens with In-Flight Beam Tracing ; analytical mode and live SEM view
• Resolution : 1.0 nm at 30 keV (In-Beam SE), 1.2 nm at 30 keV (SE), 3.5 nm at 1 keV (In-Beam SE), 0.9 nm at 1 keV with BDT
• Optical column : Intermediate Lens with electromagnetic aperture control
• Electron beam resolution : 0.9–3.5 nm depending on mode and voltage
• Beam current : 2 pA – 400 nA
• Accelerating voltage : 200 eV – 30 keV (down to 50 eV with BDT)
• Image parameters : Up to 16k×16k, 8 channels, dynamic focus, BSE, SE, multi-contrast
• Magnification : 2× – 1,000,000×
• Chamber : LM: 230 mm (12+ ports); GM: 340×315 mm (20+ ports)
• Camera details : IR camera (1 standard, 2nd optional), navigation camera optional
• Stage parameters : LM: X=80 mm, Y=60 mm, Z=50 mm; GM: X/Y=130 mm, Z=100 mm; Tilt ±80°, Rotation 360°
• Holder Types : Standard, EBSD-compatible, STEM, heavy sample (up to 8000 g)
• Sample size: Up to 180 mm diameter (GM), 8000 g weight
• Vacuum system : High vacuum <1×10⁻³ Pa, SingleVac 30 ±10 Pa, MultiVac 1–700 Pa
• Power Requirements and Consumption : 230 V ±10%, 1300 VA
• Environmental requirements : Temp 17–24°C, <65% RH, vibration <10 µm/s, <60 dBC, magnetic field <300 nT
• Vibration, Magnetic, Noise tolerance : <5 µm/s below 30 Hz, <10 µm/s above 30 Hz
• Dimensions and Weight: Approx. 3200×3100×2360 mm