JSM-IT800

High-resolution FE-SEM with in-lens Schottky Plus FEG. Integrated with Hybrid Lens, ACL, and advanced AI live image filtering. Supports SXES, EBSD, and large-area montage imaging.

• Status: Active
• Country: Japan
• Electron gun type : W Thermionic source
• Standard detectors : SED, UED
• Optional detectors : USD, BED, SXES, EBSD, TED, LVBED
• Cryo : Optional
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : SXES, EDS, EBSD, TED, WDS
• Electron optics : Neo Engine, ACL, Hybrid Lens, BD, LDF
• Resolution : 0.7 nm (20 kV), 1.3 nm (1 kV), 3.0 nm (15 kV, 5 nA, WD 10 mm); 1.3 nm (30 kV, 10 Pa) in low vacuum
• Optical column : Hybrid Lens (electrostatic + magnetic)
• Beam current : A few pA to 300 nA (30 kV)
• Accelerating voltage : 0.01 to 30 kV
• Image parameters : 640×480 to 5120×3840 px
• Magnification : ×10 to ×2,000,000 (photo); ×27 to ×5,480,000 (display)
• Chamber : Up to 200 mm diameter sample capacity
• Camera details : Optional chamber camera
• Stage parameters : Type1-3 options; up to X: 140 mm, Y: 80 mm, Tilt: -5°–70°
• Holder Types : Up to 200 mm dia., 55 mm height
• Sample size: Max Ø200 mm, H: 55 mm
• Aberration Correction type : ACL (Aperture Control Lens) optimizes probe size
• Cooling system : Cooling water required: 20 ±5°C
• Vacuum system : SIP ×2, TMP, RP ×1
• Power Requirements and Consumption : 100 V AC, 50/60 Hz, 3 kVA
• Environmental requirements : 20 ±5°C, ≤60% RH, ≤0.3 μT
• Vibration, Magnetic, Noise tolerance : ≤0.3 μT
• Dimensions and Weight: 3,000 × 2,800 mm footprint (full system)