JSM-IT710HR

Compact Schottky FE-SEM with high current and resolution. Fully embedded EDS and integrated analysis software. Offers automated observation, EBSD, and wide-area analysis.

• Status: Active
• Country: Japan
• Electron gun type : Schottky FEG
• Standard detectors : SED, BED, EDS
• Optional detectors : USD, LHSED, EBSD, WDS
• Cryo : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, WDS, EBSD, Phase Mapping, Playback Analysis
• Electron optics : Schottky field emission gun integrated with condenser lens; out-lens objective lens
• Resolution : 1.0 nm (20 kV), 3.0 nm (1 kV); 1.8 nm (15 kV BED)
• Optical column : Out-lens objective lens
• Beam current : Up to 300 nA
• Accelerating voltage : 0.5 kV to 30 kV
• Image parameters : 640×480 to 5120×3840 px; SMILE VIEW Lab integration
• Magnification : ×5 to ×600,000 (photo); ×15 to ×1,767,305 (display)
• Chamber : Large chamber; specimen size up to 200 mm dia. x 90 mm height
• Camera details : Optical image capture via Zeromag (optional SNS required)
• Stage parameters : Large eucentric stage; X: 125 mm, Y: 100 mm, Z: 80 mm, Tilt: -10–90°, Rotation: 360°
• Holder Types : Multi-specimen rotation holder (option)
• Sample size: Max. 200 mm diameter × 80 mm height
• Vacuum system : TMP: 1, SIP: 2, RP: 1
• Power Requirements and Consumption : Single phase 100 V, 50/60 Hz, 3.0 kVA
• Environmental requirements : Temp: 20 ±5°C; Humidity ≤60%; Height ≤2000 m; Noise ≤70 dB
• Vibration, Magnetic, Noise tolerance : Stray AC magnetic field: 0.3 μT or less
• Dimensions and Weight: Column unit: 780×1000×1620 mm, 650 kg