SU5000

High-performance Analytical FE-SEM. Seamless switching between HV and VP. High probe current with hybrid BSE detector.

• Status: Active
• Country: Japan
• Electron gun type : Schottky FEG
• Standard detectors : Everhart Thornley SE detector (Lower detector)
• Optional detectors : Top detector, Through-the-Lens, UVD, PD-BSD, EDS, WDS, EBSD, CL, STEM
• Cryo : Optional
• STEM : Optional
• STEM parameters: Retractable STEM detector
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, WDS, EBSD, CL, STEM, CD measurement
• Electron optics : Low aberration objective lens with beam deceleration
• Resolution : 1.2 nm at30 kV, 3.0 nm at1 kV, 2.0 nm at1 kV with deceleration mode
• Electron beam resolution : 1.2–3.0 nm
• Beam current : >200 nA
• Accelerating voltage : 0.5–30 kV (0.1 kV step)
• Image parameters : SE, BSE, MIX, Shadow, TOPO, 3D, Live stereoscopic, CS Scan
• Magnification : 10–600,000× (photo), 18–1,000,000× (800×600), 30–1,500,000× (1280×960)
• Chamber : Supports up to Ø200 mm, max height 80 mm
• Camera details : Navigation camera, image navigator, movie capture
• Stage parameters : X: 0–100 mm, Y: 0–50 mm, Z: 3–65 mm, Tilt: –20° to +90°, Rotation: 360°
• Holder Types : Multi specimen holder, cryo stage, heating/cooling stages
• Sample size: Up to Ø200 mm, 80 mm height
• Cooling system : Cryo stage and Peltier cooling stage (optional)
• Vacuum system : Rotary pump, VP: 10–300 Pa
• Dimensions and Weight: 740×1000×1650 mm, 550 kg (main unit)