Helios 5 PFIB

Ga-free TEM/APT prep and large-volume 3D analysis; Xenon PFIB; Automated multi-modal workflows

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : TLD-SE/BSE, ETD, ICE, IR, Nav-Cam, DBS
• Optional detectors : EDS, EBSD, WDS, STEM 3+
• Cryo : Yes
• FIB: Yes
• STEM : Optional
• STEM parameters: BF/DF/HAADF segments
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS; AutoTEM, AS&V4; Avizo 3D analysis
• Electron optics : Elstar SEM Column with UC+ monochromator
• Resolution : 0.6 nm at 15 kV; 0.7 nm at 1 kV; 1.0 nm at 500 V
• Optical column : Elstar SEM Column with immersion mode
• Electron beam resolution : 0.6 nm at 15 kV; 1.2 nm at 1 kV (coincident)
• Beam current : Electron: 0.8 pA – 100 nA; Ion: 1.5 pA – 2.5 µA
• Accelerating voltage : SEM: 350 V – 30 kV; FIB: 500 V – 30 kV
• Image parameters : 25 ns – 25 ms; up to 6144×4096 px; DCFI, SmartScan
• Chamber : 21 ports; 379 mm width; Integrated plasma cleaner
• Camera details : IR camera; Nav-Cam camera
• Stage parameters : 5-axis motorized; 150 mm XY; tilt –38°/+60°
• Holder Types : Multi-purpose, vise, UMB, custom
• Sample size: Up to 150 mm with full rotation
• Cooling system : Cryo options available
• Vacuum system : Oil-free; <2.6×10⁻⁶ mbar; evac <5 min
• Environmental requirements : Acoustic enclosure optional
• Vibration, Magnetic, Noise tolerance : DCFI, SmartAlign reduce vibration effects