AA8000

Multi-purpose SEM. Fully automated, high-performance, compact design. Fast scan speed, pixel resolution, and noise-free image acquisition.

Multi-purpose SEM. Fully automated, high-performance, compact design. Fast scan speed, pixel resolution, and noise-free image acquisition.

Status: Active
Country: USA
Electron gun type : W Thermionic source
Standard detectors : Bar Type SE Detector (SE-BSE conversion mode without BSE detector)
Optional detectors : BSE, EDS, WDS, EBSD, CCD, manipulator
Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, WDS, EBSD, 3D data view, particle counter, Excel data export
Electron optics : Dual field objective lens for spherical aberration reduction; upgraded magnetic lens (CL/OL)
Resolution : 3.0 nm @ 30 kV SE / 4.0 nm @ BSE
Optical column : Electromagnetic condenser (2 stages), objective (1 stage), 8-pole stigmator
Electron beam resolution : 3.0 nm / 4.0 nm
Accelerating voltage : 0.5 – 30 kV
Image parameters : Search (640×480) >30 fps, Inspection (1280×960) 30 fps, Photo (4096×4096) 2 fps
Magnification : 10 – 1,000,000X
Chamber : 50 × 60 × 57 mm, supports multiple detectors
Stage parameters : X/Y/Z = 60/70/65 mm, Tilt: –20° to +60° (Max 90°), Rotation = 360°, Motorized X,Y,R (standard); full motorization optional
Aberration Correction type : Dual field objective lens, upgraded lens design for spherical aberration reduction
Vacuum system : Rotary Pump + Diffusion or Turbo Pump; Full automation with safety system