SU3900SE/SU3800SE

High-resolution Schottky SEM. Improved low-voltage performance with VP mode. Equipped with automation and large specimen support.

• Status: Active
• Country: Japan
• Electron gun type : Schottky FEG
• Standard detectors : SED, 4+1 segment BSED, TOP detector (SE Plus)
• Optional detectors : UVD, EDS, EBSD
• Cryo : Optional
• STEM : Optional
• STEM parameters: STEM holder with BF/DF imaging
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, EM Flow Creator, Report Creator
• Electron optics : ZrO/W Schottky emitter, VP mode standard
• Resolution : 0.9 nm at30 kV, 2.5 nm at1 kV, 1.6 nm at1 kV (SE Plus)
• Electron beam resolution : 0.9–2.5 nm
• Beam current : Max. 150 nA
• Accelerating voltage : 0.5–30 kV
• Image parameters : SE, BSE, TOPO, UVD, voltage contrast, Live 3D
• Magnification : 5×–600,000×
• Chamber : SU3900: up to Ø300 mm, height 130 mm; SU3800: up to Ø200 mm, height 80 mm
• Camera details : 640×480, 1280×960, 2560×1920, 5120×3840 pixels
• Stage parameters : 5-axis motor drive, X/Y: 0–150 mm, Z: 3–85 mm, Tilt: –20° to +90°, Rotation: 360°
• Holder Types : Multi-specimen holder, heavy specimen holder (optional)
• Sample size: SU3900: Ø300 mm, 5 kg; SU3800: Ø200 mm, 2 kg
• Cooling system : Water cooling: 2.6–3.05 L/min, 0.2–0.6 MPa
• Vacuum system : Rotary pump
• Power Requirements and Consumption : AC100–115 V, 2 kVA
• Environmental requirements : 15–25 °C, ≤60% RH
• Dimensions and Weight: SU3900: 780×1,060×1,718 mm, 844 kg; SU3800: 780×1,060×1,634 mm, 600 kg