EVO MA10/EVO LS10

Compact SEM with analytical capabilities and chamber flexibility. Suitable for routine analysis and high throughput applications.

• Status: Active
• Country: Germany
• Electron gun type : Extreme FEG
• Electron gun type : W Thermionic source
• Electron gun type : LaB₆ Thermionic source
• Standard detectors : ETSE detector
• Optional detectors : HD BSD, VPSE, EPSE, EDS, WDS, EBSD, CL, STEM
• Cryo : Optional
• STEM : Optional
• STEM parameters: STEM detector for thin section imaging
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, WDS, EBSD, CL, STEM, Raman
• Electron optics : Tungsten, LaB₆, or HD Schottky FE electron sources
• Resolution : 1.9–20 nm at30 kV depending on source and mode
• Electron beam resolution : 1.9–20 nm
• Beam current : 0.5 pA to 5 µA
• Accelerating voltage : 0.2–30 kV
• Image parameters : SE, BSE, MIX, Shadow, TOPO, 3D
• Magnification : <7–1,000,000×
• Chamber : Ø310×220 mm
• Camera details : CCD for Raman spectroscopy (optional)
• Stage parameters : X: 80 mm, Y: 100 mm, Z: 35 mm, T: –10° to 90°, R: 360° (continuous)
• Holder Types : Standard and optional specialty holders
• Sample size: Max height 100 mm
• Cooling system : No water cooling required
• Vacuum system : Variable pressure 10–400 Pa (MA), 10–3000 Pa (LS)
• Power Requirements and Consumption : 100–240 V, 50/60 Hz, single phase