CX-200K

High-performance SEM with 500,000× magnification, 5-axis motorized stage, and NanoStation5 GUI for standard imaging and analysis workflows

• Status: Active
• Country: South Korea
• Electron gun type : W Thermionic source
• Standard detectors : SE, BSE
• Optional detectors : EBSD, STEM, Coolstage
• Cryo : Optional
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : NanofiberScanner, EBSD, STEM
• Electron optics : Motorized 5-axis stage, signal mixing, triple display, and optimized column design
• Resolution : <3 nm
• Electron beam resolution : <3 nm
• Accelerating voltage : 1–30 kV
• Image parameters : Triple display & save, signal mixing, annotation, line profile, image filtering
• Magnification : Photo: 6×–300,000×; Display: 9×–500,000×
• Camera details : ChamberCam
• Stage parameters : X: 60 mm, Y: 60 mm, Z: 60 mm, Rotation: 360°, Tilt: –20° to +90°
• Holder Types : Multi-sample holder (-)
• Cooling system : Optional (Coolstage)
• Vacuum system : Turbo pump (80L) + Rotary pump (100L); HV, LV (20Pa), VP (10/20/30Pa)
• Dimensions and Weight: 640(W) × 682(L) × 1,432(H) mm, 200 kg