AIS2000C

Compact Normal SEM. Full automation and wide FOV. High compatibility with analysis tools.

• Status: Active
• Country: South Korea
• Electron gun type : W Thermionic source
• Standard detectors : ET-Type SE Detector
• Optional detectors : EDS, BSE, TSEM
• STEM : Optional
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, BSE, TSEM, 3D Reconstruction S/W
• Electron optics : Electromagnetic Lens
• Resolution : 3.0 nm @ 20/30kV SE
• Accelerating voltage : 0.6–30kV
• Image parameters : Up to 8192x6144
• Magnification : 10X – 300,000X + Zoom 2X, 4X, 8X
• Stage parameters : X/Y/Z 40mm; Tilt 0–60°; Rotation 360° Endless
• Vacuum system : Rotary Pump + Turbo Pump
• Power Requirements and Consumption : 220–230V AC, 5KW, 50/60Hz
• Environmental requirements : 22±2°C, Humidity < 70%
• Vibration, Magnetic, Noise tolerance : 3μm/sec @ 5–10Hz; EMI compliant
• Dimensions and Weight: 388(W) × 600(D) × 638(H) mm