AMBER 2

Fully automated Ga FIB-SEM for routine TEM prep, nanoscale prototyping, and 3D materials analysis with BrightBeam SEM and Orage FIB

• Status: Active
• Country: Czechia
• Electron gun type : Schottky FEG
• FIB: Yes
• STEM : Yes
• STEM parameters: STEM image overlay, grain orientation, nanomanipulator-supported sample orientation
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, STEM, 3D ToF-SIMS tomography, FEBID/FIBID, prototyping
• Electron optics : BrightBeam Field-Free UHR SEM column with Orage Ga FIB column
• Resolution : -
• Optical column : Field-free analytical SEM optics; precise beam placement with Orage FIB column
• Beam current : Up to 100 nA with Orage FIB column
• Image parameters : STEM overlay with grain orientation mapping, high-quality imaging during prep
• Chamber : Integrated FIB-SEM with multi-specimen prep and TEM AutoPrep Pro
• Stage parameters : Automated multi-site TEM sample prep using TEM AutoPrep Pro
• Holder Types : TEM lift-out, inverted/planar orientation sample support
• Sample size: Multi-site TEM lamella; FIB cut of ~50 µm particle shown
• Vacuum system : High vacuum system integrated with SEM and FIB