Verios 5 XHR SEM

High-resolution SEM for nanomaterial imaging. Sub-nanometer resolution from 1 keV to 30 keV. Suitable for complex material analysis with advanced automation.

• Status: Active
• Country: USA
• Electron gun type : Schottky FEG
• Standard detectors : TLD-SE/BSE, ICD, MD, ETD, IR, Nav-Cam, DBS, STEM 3+
• Optional detectors : DBS, STEM 3+, Cryo options
• Cryo : Optional
• STEM : Optional
• STEM parameters: BF, DF, HAADF
• Additional analytical capabilities (EDS/EDX ; EELS; SAED;NBD; others) : EDS, EBSD, WDS, CL, Raman
• Electron optics : Elstar column with UC+ monochromator, immersion lens, electrostatic scanning
• Resolution : 0.6 nm at 30 kV; 0.7 nm at 1 kV; 1.0 nm at 500 V
• Optical column : Elstar extreme high-resolution column
• Electron beam resolution : 0.6 nm at 2–15 kV; 1.0 nm at 500 V
• Beam current : 0.8 pA – 100 nA
• Accelerating voltage : 350 V – 30 kV
• Image parameters : 25 ns – 25 ms; up to 6144×4096 px
• Chamber : 379 mm width, 21 ports, 4 mm WD
• Camera details : IR camera; Nav-Cam camera
• Stage parameters : XY: 150×150 mm (UC); 100×100 mm (HP); Repeatability: <1 µm or <0.5 µm
• Holder Types : Multi-stub, STEM, vise, wafer/custom
• Sample size: 150 mm (UC); 100 mm (HP) with full rotation
• Aberration Correction type : UC+ monochromator
• Cooling system : Cryo SEM available (sample transfer + prep)
• Vacuum system : Oil-free; <2.6×10⁻⁶ mbar after 24h; <5 min evac
• Power Requirements and Consumption : 100–240 V; <3.0 kVA
• Vibration, Magnetic, Noise tolerance : Vibration isolation optional; magnetic compatibility implied
• Dimensions and Weight: 980 kg (UC); - for HP